Mott GasShield® Diffusers
The ideal solution for optimizing gas flow
In the semiconductor industry, the wafer chamber is a volatile environment.
Particles within the chamber can contaminate a wafer’s surface if purge cycles are
not introduced properly. Mott GasShield® Diffusers are designed to maximize
required flow while minimizing pressure drop, resulting in a uniform diffusion of gas
that will not disturb particles in the chamber. Some Mott diffusers also offer
exceptional filtration by providing up to 9LRV (99.9999999%) reduction in particles
down to 0.003 µm. This combination of uniform flow and filtration make Mott
GasShield Diffusers the superior product of choice.
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| Center Ring Diffusers |
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Semiconductor manufacturers understand that, in order to increase through-put and
retain the cleanliness of their wafer environments, consistent and optimum
qualities are required from their component manufacturers. Mott Corporation
supplies the industry with highly efficient and consistently performing all-metal gas
filters, flow restrictors and diffusers.
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| Mott Vaccum Flange Diffusers |
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Mott high purity diffusers are a simple means of increasing through-put of a tool
without compromising yield. GasShield® Diffusers can greatly reduce ‘vent’ time of
the load lock chamber without the adverse ‘jet’ effect seen through showerheads
and standard 1/4" inlet lines. Integration of Mott diffusers has been analyzed to
reduce venting time of load locks by 75%. In some cases, this has meant an
increased throughput of 10-15%.
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Mott GasShield Diffusers (GSE Series)
9LRV Filtration |
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Designs to match your application – Mott porous all-metal gas diffusers are
available in 316LSS, Hastelloy® C-22, and nickel with a wide variety of nominal
pore sizes from 0.2 to 40 µm. By mating the correct nominal pore size, material
thickness and diffuser geometry, you can optimize the gas flow for any variation of
pressure differentials.
Hastelloy is a registered trademark of Haynes International, Inc.
Common Diffuser Configurations
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Vacuum
flange |
Face seal |
Center Ring
(Cross-section) |
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Additional benefits include:
- Back pressure can be utilized to ensure proper gas blending
- Temperature ratings up to 450°C
- Inherently strong, non-flexing media
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Centering Ring (left), Vacuum Flange (top right),
and GasShield (bottom right) Diffusers |
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Class 100 manufacturing and packaging
Mott manufacturing
methods reduce any
potential contamination
from moisture,
hydrocarbons, oxidation
and particles. We
manufacture and test our
diffusers in a Class 100
clean room environment.
And to ensure high
out-of-box quality even
further, diffuser packaging
includes a Nylon 6 inner
bag with clean
polypropylene outer bag
– for a double layer of
protection against
contaminants.
Mott Corporation – the all-metal pioneer
Founded in 1959, Mott was the first company
to introduce porous metal media to
semiconductor manufacturing – in 1989. We
are an ISO 9001-2008 certified company
offering worldwide sales and support, all of
which is focused on providing standard and
custom-engineered solutions based on Mott
porous metal and fiber metal media. |
