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Genesis Photonics Inc of Tainan, Taiwan has ordered two CRIUS Close Coupled Showerhead (CCS) MOCVD tools from Aixtron AG of Aachen, Germany. Supplied in a 31x2” configuration, the tools will be used for the manufacture of GaN epi wafers for UHB-LED products.

Genesis Photonics’ chairman David Chung said that the company has decided to migrate all of its outstanding epitaxy technology needs to the large-scale CCS technology of the CRIUS system. He added: “We have seen Close Coupled Showerhead reactors consistently prove themselves for all our LED requirements. They give us great commercial leverage thanks to its dependability along with excellent epilayer uniformity and source material efficiencies." 

Genesis previously ordered a 19x2-inch wafer CCS reactor in 2005, followed by six more in fourth-quarter 2006 as part of a long-term purchase agreement. The firm subsequently said this February that it aimed increase its monthly production capacity of epiwafers from 25,000 units in 2007 to 40,000 units by the end of 2008 (raising its monthly capacity of LED chips to 300m units). It also said that it aimed to increase its number of MOCVD reactors from 19 to over 25 units by the end of 2008.

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