China’s EpiWorld expands SiC epi foundry with new Aixtron AIX G5 WW C high-volume deposition system

Deposition equipment maker Aixtron SE of Herzogenrath, near Aachen, Germany says that in third-quarter 2019 it shipped and installed an AIX G5 WW C high-volume manufacturing system to pure-play silicon carbide (SiC) epitaxial wafer foundry EpiWorld International Co Ltd in Xiamen, China (a privately owned joint venture with investors in the USA, Japan and China) for the further development of SiC epiwafers (used mainly for manufacturing power devices for automotive applications).

Based on Aixtron’s production-proven, fully automated Planetary Reactor platform, the AIX G5 WW C MOCVD system is said to have the largest batch capacity and highest throughput in the industry. Offering flexible 6-inch or 4-inch configurations, the design is targeted at squeezing production costs to a minimum while maintaining excellent production quality.

EpiWorld aims to further expand its production capacity to meet increasing customer demand. The firm has already completed production lines for 4- and 6-inch SiC epiwafers for manufacturing 600V, 1200V and 1700V power devices.

“In recent years, we have been qualified as a leading supplier of SiC epitaxy wafers by device manufacturers in the automotive and various other sectors. Therefore, we have a strong footprint in one of the most challenging industries. We had so far served over 100 customers around the world,” says EpiWorld’s general manager Dr Gan Feng. “With this new addition, our annual capacity will be increased to 60,000 wafers in 2019. Our recently completed phase I expansion of an 18,000m2 new facility is designed to provide manufacturing space for an annual capacity of up to 400,000 wafers,” he adds.

“We are delighted to cooperate with one of the leading epitaxy foundries to accelerate the further commercialization of silicon carbide,” comments Aixtron’s president Dr Felix Grawert. “Silicon carbide will support the development of numerous high-end power electronics applications, meaning that we are paving the way for megatrends such as e-mobility or renewable energy.”

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Aixtron presents next-gen AIX G5 WW C SiC epi production system

Tags: Aixtron MOCVD

Visit: www.aixtron.com

Visit: www.epiworld-cn.com