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5 August 2008


IAF chooses Aixtron CCS reactor for InO sensor development

Aixtron AG of Aachen, Germany says that in second-quarter 2008 it received an order from the Fraunhofer Institut für Angewandte Festkörperphysik (IAF, Institute for Applied Solid-State Physics) in Freiburg, Germany for a Close Coupled Showerhead (CCS) 6x2” MOCVD tool.

The reactor will be supplied in 1x4” wafer configuration in fourth-quarter 2008, for use in R&D on indium oxide (InO) based materials for sensor applications.

The IAF is collaborating with fellow European researchers to commercialize room-temperature gas sensors. The work is an offshoot of IAF’s development of ultra-high-brightness (UHB) III-nitride LEDs. Last year the team published their first results on the development of a single-chip ozone sensor based on InO nanoparticles and blue LEDs.

The new reactor will accelerate the commercial launch of sensors that could be integrated into portable devices, such as mobile phones, says Dr. Klaus Koehler, deputy departmental head of IAF’s Epitaxy Group. The CCS was chosen because of its flexibility of susceptor configurations, he adds. “The reactor’s triple plenum showerhead provides for inherent growth uniformity with minimized pre-reactions. These characteristics, together with high precursor efficiency, make this system an ideal match for our sensor development plans.”

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