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28 July 2008


ORS reports record half-year orders for its in–situ monitoring solutions

Optical Reference Systems (ORS) Limited of St Asaph, UK has reported record half-year orders for its range of real time in–situ monitoring solutions, used in the production of compound semiconductor wafers. According to the firm, its orders for the first half of 2008 exceed the total for 2007, and includes business from North America, Asia, and Europe. ORS did not disclose the value of the orders or the customers involved.

Founded in 2000 as a university spin-off, ORS systems monitor, record, and analyse parameters such as growth rate, uniformity, and thickness during the deposition process, for such products as LEDs, lasers, and RF devices. Real time monitoring of each layer as it is deposited helps maximise wafer yield, minimise scrap, maximise production equipment (reactor) up time, repeatability, and enhanced quality. For materials such as GaN, in-situ monitoring is essential, says the firm.

ORS’ in–situ metrology solutions are available for all types of thin-film deposition systems, including: MOCVD, MBE, CVD, ALD, PLD, optical thin films, and custom-built.

For further details of ORS' range of in–situ monitoring solutions, contact:

Jenny Miller, Global Marketing Manager
Tel: +44 (0) 1745 535188
Cell: +44 (0) 77730 23580

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