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14 July 2008


Trion sells four production systems to LED maker

Plasma etch, strip and deposition system maker Trion Technology of Clearwater, FL, USA says that it has sold a further four of its Titan production platforms to a leading high-brightness LED maker.

Picture: Titan

The Titan is a compact fully automated vacuum cassette platform capable of batch processing of substrates of 2-4” in diameter and of single wafers of 4-12” in diameter. The system is available in either reactive ion etch (RIE), high-density inductive coupled plasma (HDICP) or plasma-enhanced chemical vapor deposition (PECVD) configurations. The small system width provides very high throughput per linear foot in the fab, says the firm.

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