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22 July 2009


Tyndall buys Cambridge NanoTech plasma ALD system

To enhance its atomic layer deposition (ALD) research capabilities, Tyndall National Institute in Cork, Ireland has purchased a Fiji Plasma ALD system from Cambridge NanoTech Inc of Cambridge, MA, USA, which was spun off from Harvard University’s Gordon Lab in 2003.

“The Tyndall Institute [which has CMOS, III-V and MEMS wafer fabrication capabilities] is the largest micro/nano-electronics, photonics and microsystems research institute in Ireland,” says Cambridge NanoTech’s European sales director Jeremy Davis. The Fiji system complements the institute's materials research efforts to support the introduction of new materials into its device fabrication process, he adds.

“The dual chamber system provides excellent process versatility, more functionality, and fits in a very small footprint,” says Tyndall process engineer Alan Blake. Cambridge NanoTech also provided support during the start-up phase as well as training, and continues to provide follow-up support as needed.

The Fiji system delivers versatility for both plasma and thermal ALD deposition. Its flexible system design, including a dual-chamber configuration, is customizable for optimum experimental efficiency, says Cambridge NanoTech. With very low precursor consumption, a fully integrated ALD Shield vapor trap, and off-the-shelf replacement costs, the Fiji reduces operating costs and simplifies system maintenance, the firm claims.

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