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23 November 2009


Entegris ships gas purification systems to Taiwanese LED maker Lextar

Entegris Inc of Billerica, MA, USA, which provides products for purifying, protecting and transporting materials used in semiconductor processing and manufacturing, says that it has shipped multiple Aeronex gas purification systems to Lextar Electronics Corp, a Taiwan-based manufacturer of high-brightness LED (HB-LED) products. Lextar is also one of the world’s top three manufacturers of thin-film transistor liquid crystal display (TFT-LCD) panels.

Lextar has bought separate Aeronex gas purification systems for purifying nitrogen, hydrogen and ammonia used in the gallium nitride-based LED manufacturing process. The systems remove a variety of contaminants (including moisture and oxygen down to the parts-per-billion level) from the process gases used during metal organic chemical vapor deposition (MOCVD). Removal of such contaminants enhances the photoluminescence of LED devices, says Entegris.

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