News

16 November 2009

 

Nanometrics receives multiple metrology orders for HB-LEDs

Nanometrics Inc of Milpitas, CA, USA, a supplier of process control metrology systems primarily for manufacturing semiconductors, solar photovoltaics and high-brightness LEDs, says that it has received multiple orders from new and existing HB-LED customers for RPMBlue and IVS185 metrology systems (for delivery and qualification in Q4/2009). The systems will be used for photoluminescence (PL) mapping and critical dimension and overlay control, respectively.

“Customers in Asia are adopting the high-productivity RPMBlue to support the rapidly growing application of HB-LEDs for backlighting of notebook and LCD televisions,” says Tom Ryan, director of the Materials Characterization business unit. The latest round of RPMBlue orders comes from end-device manufacturers as well as a leading MOCVD reactor supplier. “As the HB-LED process flow becomes increasingly complex, it drives the requirement for improved control of overlay and critical dimensions in the patterning process,” he adds. “Our IVS185 system, shipping for the first time to an HB-LED customer, is a cost-effective solution that incorporates both overlay and CD control in a single tool, with extendibility across multiple substrate sizes.”

Nanometrics offers a range of products and technologies for HB-LED metrology and process control, including the RPMBlue for high-volume production of LEDs used in LCD backlighting, the Vertex PL mapping system to support HB-LED process development, and the IVS185 overlay and CD system for LED patterning process control. Nanometrics claims that the systems are used by over 90% of the top-tier HB-LED makers in development and production.

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