1 April 2010


OIPT wins order from silicon solar cell manufacturer

Well known for supplying materials, as well as etch and deposition equipment, to the compound semiconductor manufacturing industry, Oxford Instruments Plasma Technology (OIPT) is also seeing order activity from the silicon solar cell manufacturing sector. Recently, the firm won a contract for a five module cluster tool from silicon solar cell manufacturer Robert Bosch of Stuttgart, Germany. The tool will be used for research and development.

OIPT’s System100Pro deposition tool is a ‘Hex Handler’ providing capabilities for several deposition technologies, allowing multiple process steps to be carried out without a vacuum break, says the firm. Furthermore, it has the option of integrating a Kelvin Probe for in-situ measurement capability of material work functions and photo voltage, without a vacuum break.

OIPT cluster systems offer high vacuum options for the handler and process modules, resulting in reduced background contamination levels, and the ability to cluster different deposition technologies. The Robert Bosch system also incorporates a high temperature substrate table option up to 700ºC, and flexibility of power ramping within the software.

See: Oxford Instruments Company Profile

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