27 July 2010


Meijo orders Aixtron CCS MOCVD system for GaN-based UV and white LEDs

Deposition equipment maker Aixtron AG of Aachen-Herzogenrath, Germany says that earlier this year it received a new order for a Close Coupled Showerhead GaN-based LED MOCVD system from established Aixtron customer Meijo University in Nagoya, Japan. The system will be delivered in fourth-quarter 2010 in 3x2”-wafer configuration. The local Aixtron support team will commission the new reactor at Meijo.

The order includes both the EpiCurveTT and Aixtron ARGUS in-situ tools. The latter is a new multi-channel pyrometer that allows real-time surface temperature measurement and analysis and is the only thermal profiling device available for a complete susceptor temperature mapping, says Aixtron.

“Meijo University plans to establish the LED Cooperative Research Center to develop white LEDs and UV-LEDs for lighting and bactericidal light sources with super energy-saving, high-color-rendering properties, long life-time and low-cost,” says associate professor Dr Motoaki Iwaya. The center has been selected as an advanced research institute, and funded by Ministry of Economy, Trade and Industry (METI). It will be shared with partner companies for collaboration, including EL-SEED Corp, a start-up venture company from Meijo University, which will conduct a research project at the center for next-generation white LEDs supported by the New Energy and Industrial Technology Development Organization (NEDO).

“We have been very happy with our current system, an AIX 200/4 RF-S,” says Iwaya. “Furthermore, Aixtron’s proven R&D showerhead systems have demonstrated in the past their great scalability and easy process transfer to showerhead production systems,” he adds. “The 3x2” system enables us to easily switch between 2”, 3” and 4” wafers, without any major adaption of the process conditions... we are confident that the Aixtron MOCVD system is the best for the challenging task of GaN based LED development.”

Meijo University’s Department of Materials Science and Engineering is one of Japan’s longest-established faculties. Its research targets include nanotechnology as well as semiconductor materials, and it has been awarded many competitive grants from the Ministry of Education, Culture, Sports, Science and Technology (MEXT), METI and NEDO. Its researchers include professor Akasaki, who played a key role in the development of blue LEDs and blue-violet semiconductor lasers.

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