4 May 2010


ETH Zurich orders Aixtron Black Magic tool

Deposition equipment maker Aixtron AG of Herzogenrath, Germany says it has recieved an order for a Black Magic CNT (carbon nanotube) deposition system from ETH Zurich, based in Switzerland. The system, in a 1x4 inch wafer configuration, has already been installed at ETH Zurich’s Department of Mechanical and Process Engineering.

“The system interface is user friendly and the reactor uses growth technology that has been proven in many labs as well as industry. We are extremely pleased with the system and it has consistently produced high quality, vertically aligned single wall carbon nanotubes which is exactly what we require. We are integrating these nanotubes into novel devices on a wafer-scale," said Professor Hyung Gyu Park, head of ETH Zurich’s Nanoscience for Energy Technology and Sustainability group.

Park joined ETH Zurich in April 2009, where his research program involves fundamental nanoscience of energy technology applications using various CNT nanofluidic platforms and other nanostructures to study basic properties of transport under extreme confinement commensurable with transporting molecules’ own sizes. Future applications cover solar energy harvesting and fuel cells as well as highly sensitive, nondestructive sensors, says Aixtron.

See related item:

UCSB orders Aixtron Black Magic PECVD system

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