17 November 2010

Ostendo orders Oxford Instruments deposition and etch systems

UK-based equipment maker Oxford Instruments has received a multi-system order for its PlasmaPro System100 PECVD deposition and PlasmaPro System100 ICP etch tools from Ostendo Technologies Inc of Carlsbad, CA, USA. The multi-wafer batch tools will be used by Ostendo in its development of next-generation solid-state lighting (SSL)-based display technologies and products for commercial and consumer markets.

“Our objective is to achieve efficiencies and cost effectiveness at the material, device and system levels. We chose Oxford Instruments’ leading-edge tools as they offer high throughput and excellent uniformity in addition to multi-batch capability,” says Ostendo’s CEO Dr Hussein El-Ghoroury. “Ostendo’s enabling technologies support products that are disruptive in their individual marketplaces, and this will be achieved more effectively with the addition of our Oxford Instruments tools,” he adds.

“This latest order from Ostendo reinforces our relationship with this important and innovative SSL display technology provider,” comments Stuart Mitchell, VP Oxford Instruments America Inc.

Earlier this year, subsidiary Oxford Instruments—TDI announced the availability of a semi-polar (11-22) gallium nitride (GaN) layer on sapphire substrate wafers using Ostendo’s proprietary design and TDI’s proprietary hydride vapor phase epitaxy (HVPE) technology. The firms says that their joint development provides the opportunity to high-brightness light-emitting diode (HB-LED) and laser diode developers to increase optical efficiency significantly compared with structures grown on c-plane GaN substrates.

See related items:

Ostendo and OI-TDI offer Semi-Polar GaN wafers for LEDs and LDs

Tags: Oxford Instruments PlasmaPro System100 Ostendo Technologies

Visit: www.ostendo.com

Visit: www.oxford-instruments.com

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