23 September 2010


Genesis Photonics orders six Aixtron CRIUS II systems to ramp GaN-based epiwafer production

Deposition equipment maker Aixtron AG of Aachen-Herzogenrath, Germany says that during Q2/2010 it received an order for six new generation CRIUS II deposition systems (55x2-inch wafer configuration) from Taiwan’s Genesis Photonics Inc. The systems, which will be delivered between Q4/2010 and Q2/2011, will be used for the production of GaN-based green and blue LEDs.

“Genesis has always used Aixtron Close Coupled Showerhead (CCS) systems for the manufacture of our high performance green LED wafers. I know we can rely on the quality of Aixtron engineering and always appreciate their responsive local support. Genesis recently won a large order which has taken us over our existing capacity limit so we must quickly bring in new expansion for our LED epi production line. When we receive the first CRIUS II system at the end of this year, we will transfer our recipes from our existing systems to the new platform before applying it to the systems to be delivered in 2011. We also anticipate placing further system orders during next year as we expand to meet demand,” said David Chung, chairman of Genesis Photonics.

“The new generation of AIXTRON MOCVD not only doubles productivity but also provides even better epitaxial results,” says Dr Bastian Marheineke, VP Sales at Aixtron. “The CRIUS II provides a straightforward migration path and scalability minimizing the time to-market steps required. We’re committed to fully support for our customer’s success with the new platform.”

See related items:

Genesis increases prices for green LED epiwafers

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