26 August 2011

Bruker launches Dimension Edge PSS AFM for HB-LED production metrology

Bruker Corp (a provider of scientific instruments and solutions for molecular and materials research as well as for industrial and applied analysis) has launched the Dimension Edge PSS atomic force microscope, a production-environment AFM specifically tailored for patterned sapphire substrate (PSS) metrology in high-brightness light-emitting diode (HB-LED) manufacturing.

Bruker says that the Dimension Edge PSS is an easy-to-operate AFM that delivers resolution far beyond traditional optical techniques while at the same time providing precise 3D profile information to control the most advanced PSS processes. The system performs automated measurement, data collection, data analysis and report generation on 2–6-inch wafers for production metrology applications, and offers a multitude of AFM capabilities essential for LED R&D, the firm adds. The Dimension Edge PSS comes with Bruker’s exclusive AutoMET software package, which improves manufacturing productivity by fully automating AFM data collection and analysis report generation to provide a PASS/FAIL output for technician operation.

“Driven by ever increasing performance and cost demands, HB-LED manufacturers are looking to PSS technology to deliver critical process improvements, and the Dimension Edge PSS is instrumental in controlling these advanced processes,” says Mark R. Munch PhD, president of the Bruker Nano Surfaces Division. “The Dimension Edge PSS provides rapid process feedback with its speed of measurement and unmatched precision and resolution,” he claims.

“The Dimension Edge PSS brings reliable AFM metrology into industrial applications, enabling the highest-resolution measurements, and providing simple pass or fail measurement criteria for operator ease of use,” says David V. Rossi, VP & general manager of Bruker’s AFM Business. 
The Dimension Edge PSS system uses the strengths of the Dimension Edge AFM along with proprietary software to provide a turnkey production metrology solution for patterned sapphire substrate manufactures. These features combine to allow for technician-level operation and a system suited to production environments. Bruker’s automation software package is designed specifically to meet the production needs of HB-LED makers. The software can easily be configured to measure between one to nine wafers at multiple points per wafer, including automated data analysis and reporting, providing measurement details to the engineer and a PASS/FAIL indicator to the operator.

Tags: Bruker HB-LEDs Metrology

Visit: www.bruker-axs.com