8 February 2011

Taiwan’s ITRI and Oxford Instruments agree research collaboration

A research-based collaboration agreement has been signed based on UK-based etch, deposition and growth system maker Oxford Instruments providing a high-brightness light-emitting diode (HB-LED)-related process research center staffed by its process engineers at the Industrial Technology Research Institute (ITRI) in Hsinchu, Taiwan, benefitting both ITRI and Oxford Instruments’ extensive Far Eastern customer base.

ITRI is a not-for-profit applied research organization working across multiple industrial technology fields and, since its inception in 1973, it has focussed on R&D related to industry in order to improve domestic industrial technologies.

Oxford Instruments will soon be installing several more systems in ITRI’s cleanroom. The firm’s process engineers will have use of this and selected other equipment at the institute, in order to provide process demonstrations and to support customers in the Far East in the performance of their tools.

Oxford Instruments says that this will in effect expand its research capabilities so that the firm can now provide its process offering more effectively to customers in Asia. Oxford Instruments already has a number of systems installed at ITRI including a PlasmaPro System100 multi-chamber cluster tool incorporating plasma-enhanced chemical vapor deposition (PECVD), reactive ion etching (RIE) and atomic layer deposition (ALD), a PlasmaPro System100 ICP380 plasma etch tool, and a PlasmaPro System80Plus PECVD plasma deposition tool, all used for advancing research at the facility.

Three further systems have been installed in the dedicated Oxford Instruments Optoelectronics Laboratory — a PlasmaPro NGP1000 PECVD system, a PlasmaPro NGP1000 Etch system, and a PlasmaPro System133 ICP380 — with additional tools to follow in the next phase.

“In the materials chemical technology and nano technology fields, amongst others, ITRI collaborates with prominent industries in Taiwan and worldwide to develop and to promote the establishment of high-value industries and application of nanotechnology by traditional industries,” says ITRI vice president Dr Shing-Yuan Tsai.

“One of Oxford Instruments’ key objectives is to pursue responsible development and deeper understanding of the world through science and technology, and this collaboration with such a prestigious research institute is precisely the type of activity that will achieve this goal,” comments Jeffrey Seah, head of Asia Sales at Oxford Instruments Plasma Technology (OIPT).

See: Oxford Instruments Company Profile


Visit: www.oxford-instruments.com

Visit: www.itri.org.tw/eng

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