3 February 2011

SPTS acquires HF vapor oxide etch firm Primaxx

SPP Process Technology Systems Ltd (SPTS) of Newport, Wales UK, which makes plasma etch, deposition and thermal processing equipment, says that in December it completed the transfer of ownership of Primaxx Inc of Allentown, PA, USA from SPTS’ parent company, Japan’s Sumitomo Precision Products Co Ltd (SPP), to SPTS.

Primaxx provides residue-free micro-electro-mechanical systems (MEMS) dry etch release equipment. The transfer therefore strengthens SPTS’ etch technology portfolio, which includes deep silicon etch, dielectric etch, inductively coupled plasma (ICP) etch, and now hydrogen fluoride (HF) vapor oxide etch.

Primaxx’s patented HF vapor oxide etch technology uses a reduced-pressure, gas-phase, controlled anhydrous HF/alcohol process to deliver residue-free ‘etch release’ to remove the sacrificial silicon oxide layers used in MEMS manufacturing. Using HF, the sacrificial layer is etched with high selectivity relative to the structural layer.

“Considering the complementary products and synergies that already exist within both companies, bringing the Primaxx range of products and services into the SPTS family expands our customer offerings,” says SPTS’ president & CEO William Johnson. “It allows SPTS to provide an expanded manufacturing portfolio to our MEMS customers,” he adds. “In the long-term, SPTS will also explore opportunities to provide more integrated process schemes related to HF release technologies.”

Primaxx’s president & CEO Paul Hammond echoed the sentiment that, with the transfer of ownership, Primaxx customers now benefit from the expanded service, support and distribution infrastructure of SPTS, with one consolidated contact point. “Through our parent company, Primaxx has already been working closely with SPTS; the acquisition is a natural progression in the relationship that immediately augments Primaxx’s sales and marketing capabilities,” he adds.

The Primaxx brand is planned to remain unchanged, while current process modules will eventually be consolidated with SPTS’ production-proven fxP wafer transport and control system.


Visit: www.spp-pts.com

Visit: www.primaxxinc.com

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