13 July 2011

SEMI-GAS offering bulk specialty gas source systems with flow rates of 1000slpm

SEMI-GAS Systems of Malvern, PA, USA, a division of Applied Energy Systems Inc that manufactures ultra-high-purity gas source and distribution systems, says that it is offering bulk gas source systems to safely deliver hazardous specialty process gases (including NH3, HCl, SiH4, N2O, and H2) from large vessels at high flow rates (from 100 slpm up to 1000slpm).

SEMI-GAS’ bulk specialty gas source systems consolidate many gas cabinets into a single system for high-volume semiconductor production, as well as for high-gas-volume-consuming processes, as found in LED and solar cell production applications. With consideration to the local climate, the source systems can be installed both indoors or outdoors.

Source vessel heating is incorporated into the system to facilitate the liquid-to-gas phase change and to sustain the high gas flow rates. Additional heating elements within the process gas lines, prior to pressure regulation, also control the enthalpy and undesirable phase changes.

SEMI-GAS says that bulk specialty gas source systems help to increase operator safety by minimizing the frequency that the operator must change the empty gas cylinders. Safe operation is also ensured through several levels of system redundancy designed into the source system to continue critical gas supply and system operation at all times, avoiding costly downtime.

Each SEMI-GAS bulk source system includes a PLC controller designed to monitor analog and digital process sensors, perform purging and cylinder switchover automatically, and continuously monitor system conditions for alarms (including flow, pressure, exhaust and fire). The source system will shut down automatically in the event of an alarm trip. All of these elements can be monitored and controlled via the color touch-screen operator interface.

The standard source system enclosures are 86” tall, 40” wide and 23” deep, and constructed of welded 11 gauge steel. Each features a self-closing and self-latching door and window with 1/4” thick safety glass and polycarbonate face shield for increased operator protection. The fire sprinkler that is included is UL-approved.

Tags: Bulk gas source systems

Visit: www.semi-gas.com

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