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11 December 2012

Plasma-Therm and Stanford host plasma processing workshop

Plasma process equipment maker Plasma-Therm LLC of St Petersburg, FL, USA has provided a two day plasma processing workshop at Stanford University’s Nanofabrication Facility (SNF).

Presentations addressed both fundamental and advanced plasma etching and deposition technologies used primarily in semiconductor device fabrication and materials science research. The Stanford facility, part of NNIN (National Nanofabrication Infrastructure Network), provides resources for both academic and industrial users and attracts researchers from throughout the world.

Attendees included graduate students, facility staff, post-doctoral researchers and engineers from 13 local companies from start-ups to Fortune 500. This technology community outreach event attracted researchers involved in projects requiring process capability spanning a broad range of cutting edge research topics as diverse as solar energy, nanostructures, data storage, opto-telecommunications, and MEMS.

“I thoroughly enjoyed the class- I learned a lot and the slides provided valuable reference material,” said Michelle Rincon, Ph.D., process staff engineer Stanford Nanofabrication Facility.

Aparna Aryabumi, engineer at Kovio, added, “I was one of the attendees at the workshop and found it extremely useful and informative. Thanks so much for presenting it to us. Though I made notes of all the key points from today, the slides are serving as a great resource. I’m regularly referring to them as embark on a new PECVD adventure.”

“The opportunity to present and interact with the current and next generation researchers from SNF and the surrounding technical community is greatly appreciated,” explained Dr. David Lishan, Plasma-Therm principal scientist and workshop series organizer. “These well attended workshops are evidence of the interest in plasma processing and the topics in the two day workshop provide researchers an extensive set of relevant tools not often covered in traditional curriculum or training programs.”

Tags: Plasma-Therm


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