21 February 2012

Oxford Instruments’ plasma systems chosen for UK’s Lancaster Quantum Technology Centre

As part of its strategy for the development of physical sciences, Lancaster University in the UK is populating part of its new Lancaster Quantum Technology Centre (LQTC) with plasma systems made by UK-based Oxford Instruments.

Oxford Instruments Plasma Technology (OIPT) says that its proven PlasmaPro NGP80 and PlasmaPro System100 ICP Etch systems were chosen for their flexibility and suitability to enable the many applications that the multi-user LQTC wishes to run in its cleanrooms, as well as an extensive process library of more than 6000 recipes together with customer support, service and training packages.

Picture: PlasmaPro System100 ICP Etch tool.

“These new Oxford Instruments etch tools will enable us to run dry plasma etching and nano-patterning on a range of semiconductors including narrow-gap antimonides and dilute nitrides for mid-infrared light sources and detectors,” says professor Tony Krier, head of Lancaster University’s Semiconductor Physics & Nanostructures Research Group. “They will also be used for development of novel solar cells, quantum dot memories, nano-electronic structures, and much more,” he adds.

“The new cleanroom facility provides a focus for industrial and academic researchers with interests in fabricating nanoscale structures to enable them to investigate quantum phenomena,” Krier continues. “We chose Oxford Instruments because of the excellent technical specification and well founded reputation of the processing tools, backed up by expert specialist support,” he comments.

“Oxford Instruments was founded as a result of the pull-through of science into the marketplace, and we are delighted to be part of this significant development in UK scientific research capabilities,” notes Mark Vosloo, sales & customer support director at OIPT.

Tags: OIPT PlasmaPro NGP80 PlasmaPro System100 Etch

Visit: www.physics.lancs.ac.uk/qtc

Visit: www.oxford-instruments.com

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