20 March 2012

SÜSS MicroTec launches multi-market resist coat and develop platform

SÜSS MicroTec AG of Garching, near Munich, Germany, a supplier of equipment and process solutions for microstructuring in the semiconductor and related markets, has launched the RCD8, a new manual resist coat and develop platform for substrates. The firm says that the new platform offers high flexibility in application, coupled with low investment costs as well as an easy transfer of processes from the RCD8 manual platform to a SUSS MicroTec production tool.

The RCD8 is claimed to be the only tool on the market offering the option to convert from a spin coater (with patented GYRSET closed cover coating technology) to a spray developer within a few minutes. This coat and develop platform can be customized to anything between, for example, a basic manual spin coater to a semi-automated GYRSET enhanced coater and puddle & spray developer tool, serving daily R&D work up to small-scale production.

In the past, multiple dedicated tools of in the firm’s Delta Series were used for specific applications in MEMS, advanced packaging, LED or R&D applications. The different types of tool are now brought together in the RCD8 platform, which covers all necessary coating and developing processes for these applications.

As an additional option, the patented GYRSET rotating closed cover coating technology can be integrated into the RCD8 spin coating module. For various photoresists and applications, the GYRSET technology enables a wider process window and reduces material consumption significantly, it is claimed. Furthermore, the technology allows even square substrates and pieces to be coated all the way to the corners with homogenous resist thickness.

“Whenever process changes are required over time, this versatile tool can be field upgraded with various options,” notes president & CEO Frank P. Averdung. “With its large variety of available chucks and configurations, literally all kind of substrate materials and shapes can be coated and developed on the RCD8,” he adds.

Tags: SÜSS MicroTec

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