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5 November 2012

OIPT launches upgrades for plasma and ion beam etch and deposition systems

UK-based etch, deposition and growth system maker Oxford Instruments Plasma Technology (OIPT), part of Oxford Instruments plc, has launched a new range of system upgrade options for its etch and deposition tools.

Upgrades include:

  • The X20 Control System, offering excellent scan speeds and processing resulting in accurate control and precise data logging.
  • The Maglev Turbo replaces the current traditional bearing turbo pumps for superior pumping speeds and up to 15% higher throughput. Maglev Turbo is robust and provides high performance and increased up-time.
  • Etch and deposition end point detection options for achieving optimal process conditions and results. The optical end points enable real-time chamber clean endpoint detection, increasing the availability of the tool, and lowering cost of ownership.

“This new range of upgrades aims to offer our customers the latest hardware so that they have the opportunity for improved performance and extended lifetime of their Oxford Instruments system.” said Mark Vosloo, Sales, CS and Marketing director, OIPT.

These upgrades add to the wide range of options already offered for the Plasmalab, PlasmaPro and Ionfab families of systems, adds the firm. 

Tags: Oxford Instruments ALD PECVD Etch


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