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20 November 2012

Plasma-Therm and SINANO CAS host plasma processing workshop

Plasma process equipment maker Plasma-Therm LLC of St Petersburg, FL, USA has provided an advanced plasma processing workshop at Suzhou Institute of Nano-tech and Nano-bionics Chinese Academy of Sciences (SINANO CAS), with presentations on fundamental and advanced plasma etching and deposition technologies used primarily in semiconductor device fabrication and materials science research.

The workshop was hosted by the Nanofabrication Facility (NFF) of SINANO, which offers processing capability for research projects of other departments within SINANO and provides services for local companies’ R&D, training technicians for state and local enterprises acting as an incubator for the micro/nano optoelectronic industrial base in Suzhou City.

Over 130 delegates, including graduate students, facility staff, post-doctoral researchers and engineers, involved in projects requiring process capability spanning a broad range of topics such as MEMS, biosensors, graphene research and optoelectronic devices, attended the workshop.

Prof. Jianjun Zhu, at the SINANO NFF said, “The Plasma-Therm Plasma Processing workshop was informative and substantial, which is very valuable for students and engineers in the academic and industrial technology communities. The course was well arranged, covering the basics of plasma knowledge, dry etch and deposition processes and principles, with intuitive and deep explanations. Although I have little experience on semiconductor processing line, the workshop showed me an impressive picture of how to utilize the magic power of plasma in device fabrication. The presentations gave me as well as many other attendees a clear view of the processing III-V and Si-based devices. I look forward to incorporating concepts and to future workshops.”

“The attendance for a weekend technology workshop event was very impressive and is indicative of the interest in plasma processing technology” added Dr. David Lishan, Plasma-Therm principal scientist and organizer of the workshop series. “Participants come from a wide background. It is rewarding to present material to such an audience and challenging to make plasma processing concepts accessible. With these events, Plasma-Therm gains better insight into research directions and researchers are able to better utilize their plasma equipment and improve their process results.”

Tags: Plasma-Therm


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