14 September 2012

Nanotronics Imaging to offer multi-functional defect inspection system handling both blank and patterned semiconductor wafers

Nanotronics Imaging LLC of Cuyahoga Falls, OH, USA has introduced new capabilities for its nSPEC product, a fully automatic inspection system for analyzing transparent and semi-transparent wafers for defects.

nSPEC now detects and categorizes defects on semiconductor wafers after photolithographic patterning and other chip processing steps.  Nanotronics adds that the system has proven highly effective for inspection of blank wafers (substrates and epitaxial) across a full range of compound semiconductor materials: SiC, GaN, GaAs, InP etc.  The patterned wafer inspection feature makes nSPEC a unique tool, with the capability to track wafer quality through the whole chip manufacturing process from bare substrate to fully processed devices.

Software has been developed in collaboration with Microsemi Corp of Aliso Viejo, CA and supported by funding from US Air Force.

Bruce Odekirk, SiC Program director at the Microsemi manufacturing facility in Bend, Oregon, said: “We have been early adopters of nSPEC for SiC epitaxial wafer inspection, and our first Nanotronics tool has been producing highly informative data for over a year.  Now we are delighted to extend its ability to monitor and improve our post-epi chip processing with equally great performance and cost-effectiveness.”

Ivan Eliashevich, VP at Nanotronics Imaging, added: “nSPEC’s versatility in image acquisition and state-of-the-art data processing power allow us to deliver exceptionally broad range of testing capabilities by adding new software-driven features to existing tool platforms. Instead of bearing the expense of buying multiple tools, dealing with data compatibility issues etc., customers now can have multiple functions seamlessly combined in one affordable machine.”

Commercial release of the patterned wafer inspection software for new and existing nSPEC systems is due Q1/2013. It is currently available for evaluation as a beta version.

Tags: Nanotronics Automated wafer inspection system SiC GaN GaAs InP Epiwafers

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