18 September 2012

Oxford Instruments Plasma Technology marks 400th sale of plasma processing tool for HB-LED production

UK-based etch, deposition and growth system maker Oxford Instruments Plasma Technology (OIPT), part of Oxford Instruments plc, says that this month saw the 400th sale of its plasma processing tool for HB-LED production, with the receipt of a multi-tool order from China’s largest HB-LED manufacturer.

‘It gives me a great sense of achievement to say that we have helped to enable the HB-LED revolution” says Dan Ayres, managing director of OIPT, “Our systems play a vital role in manufacturing HB-LEDs, and we have served the industry as it has developed from its R&D roots into the global industry it is today.” Ayres continued “We have been able to offer systems for high performance every step of the way, developing our tools to match customer demands as the market has evolved. Our PlasmaPro range of systems offers both batch and single wafer solutions to manufacturers, using the latest technologies available, developed by our expert technology and applications teams.”

Oxford Instruments produces plasma equipment for etching sapphire and gallium nitride (GaN), and also PECVD tools for depositing the dielectric layers essential for the finished HB-LED devices.

Tags: OIPT

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