30 September 2013

UMass orders Aixtron BM system for CNT and graphene research

Deposition equipment maker Aixtron SE of Herzogenrath, Germany has received a purchase order from the University of Massachusetts (UMass) Lowell, USA, for a BM deposition system equipped for processing 4-inch substrates. The equipment has been shipped to the university’s Emerging Technologies and Innovation Center (ETIC), which is a shared research facility for academics, start-ups and companies-inresidence.

“We will use the new system for the integration of carbon nanotubes (CNT) and graphene into a large variety of electronic applications ranging from high frequency transistors, energy storage and flexible electronics. The engineering community here is eager to exploit graphene and carbon nanotube properties. The BM system provides a flexible, reliable platform for depositing these materials,”
said Thomas Ferraguto, director of Nanofabrication Cleanroom Operations at Massachusetts’
Core Research Facility.

Accessing the unique properties of graphene and carbon nanotubes for commercial applications is the key challenge for future R&D and manufacturing. Aixtron’s highly flexible system can deposit both graphene and CNT materials with precisely controlled critical surface dimensions, enabling manufacturers to improve throughput, performance, yield and quality. The BM system also features automatic process control, easy recipe editing, an integrated process camera and remote operation via TCP/IP networking.

Tags: Aixtron BM system Graphene CNT

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