ARM Purification

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26 October 2015

LayTec launching Gen3 class of modular in-situ metrology tools

In-situ metrology system maker LayTec AG of Berlin, Germany says that, starting in first-quarter 2016, it will ship in-situ metrology tools (EpiTT, EpiCurve TT and Pyro 400) as part of the new and modular Gen3 class.

The third generation of in-situ metrology tools offers what are said to be significant technology advances and is more flexible in customization to the needs of specific epitaxy processes.

As an important example of these improvements, the firm cites its recent progress in metrology for metal-organic chemical vapor deposition (MOCVD) related to ultraviolet light-emitting diodes (UV LEDs). Since 2010, LayTec has been working together with the Joint Lab GaN Optoelectronics of Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik (FBH) in Berlin, Germany and the group of professor M. Kneissl at Technical University of Berlin. Within the consortium 'Advanced UV for Life' under the program 'Zwanzig20 - Partnerschaft für Innovation' of Germany's Bundesministerium für Bildung und Forschung (BMBF), the research target is next-generation technology for UV-B and UV-C III-nitride-based LEDs.

Tags: LayTec Metrology MOCVD UV LEDs

Visit: www.ur-zwanzig20.de

Visit: www.laytec.de/solutions/advanced-rd

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