ARM Purification

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29September 2015

Asahi Kasei buys Veeco MBE system to expand infrared sensor production

Epitaxial deposition and process equipment maker Veeco Instruments Inc of Plainview, NY, USA says that Tokyo-based electronics company Asahi Kasei Microdevices (AKM) has purchased a GEN200 molecular beam epitaxy system and SUMO effusion cells to expand their production of infrared sensors.

"Veeco clearly demonstrated their expertise and their system's superior process performance capability," comments Dr Yoshihiko Shibata, general manager of Asahi Kasei Microdevices' Fuji Manufacturing Center. "The GEN200 provides us with superior heater performance and the SUMO effusion cells offer exceptional uniformity and process stability that are required to meet our demanding sensor production requirements," he adds.

Veeco says that, based on customer feedback, the GEN200 MBE system delivers compelling cost of ownership through long campaigns and excellent wafer quality in the production of gallium arsenide (GaAs)- and indium phosphide (InP)-based wafers for infrared sensors and laser diodes. The system also features a modular architecture that allows a significantly smaller footprint than comparable MBE systems and allows for up to two growth modules for greater throughput, the firm adds.

See related items:

Room-temperature indium antimonide mid-infrared photodiode

Tags: Veeco MBE Asahi Kasei Mid-infrared detectors

Visit: www.akm.com/akm/en

Visit: www.veeco.com

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