ARM Purification

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14 July 2016

Nanjing University orders Oxford Instruments plasma systems

UK-based plasma etch and deposition processing system manufacturer Oxford Instruments Plasma Technology (OIPT) has won an order from Nanjing University of Post and Telecommunications in Nanjiang, Jiangsu, China for multiple plasma etch systems to be used for silicon and III-V etching.

OIPT says that the highly configurable PlasmaPro 100 systems offer a range of processes that make them suitable for the nanotechnology research being undertaken by Nanjing University. PlasmaPro 100 process modules are built on 200mm platforms, with both single-wafer and multi-wafer batch capability.

"We conducted a rigorous tender process and decided on Oxford Instruments for their state-of-the-art processing equipment that is key to our successful research," says Dr Huang Xiaoming of the Nanjing University of Post and Telecommunications. "The process modules offer excellent uniformity and high throughput processes which, together with a global customer support network and low cost of ownership, made this the system of choice for our university," he comments.

"Our PlasmaPro etch tools, installed in the Nanjing University cleanroom, will enable a wide range of research programs utilizing their capabilities in III-V and silicon etching," notes OIPT's strategic marketing & business development director Frazer Anderson.

Tags: OIPT

Visit: www.oxford-instruments.com/plasma

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