ARM Purification

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8 February 2017

Entegris launches higher-purity gas purification system platform as it expands manufacturing in Asia

Entegris Inc of Billerica, MA, USA, which provides specialty chemicals and materials handling solutions, has launched a new platform for gas purification that improves wafer yields for semiconductor and LED applications.

On display in booth #5504 (Hall D) at the SEMICON Korea 2017 trade show in Seoul (8-10 February), the new family of GateKeeper gas purification systems (GPS) applies new purification media to provide what is claimed to be best-in-class gas purity at a wide range of flow rates with a reduced equipment footprint. With expanded capacity in South Korea, Entegris now manufactures GateKeeper GPS systems in both North America and Asia.

"Our customers face unprecedented contamination control challenges to efficiently manufacture today's increasingly complex leading-edge-devices," says Entegris' senior VP of Microcontamination Control, Clint Haris. "The new Gatekeeper GPS family of systems provide the advanced solutions required to maximize yield in these environments," he adds. "In conjunction with these new technology introductions, we continue our investments in our North America and Asia facilities to expand our global service and manufacturing capabilities."

Semiconductor processes for advanced nodes, as well as LED manufacturing requirements, call for increased purity to remove defect-causing contaminants found in process gases. The GateKeeper GPS family of systems removes a variety of contaminants from gas streams down to the parts-per-trillion level and can be configured to a wide range of flow rates. Gases purified include CDA, N2, H2, H2 for extreme ultraviolet (EUV), Ar and NH3. Additionally, manufacturers are looking for tools that require significantly less sub-fab floor space. The reduced footprint allows users to devote valuable sub-fab floor space to other tool needs or increase purification capacity with additional systems.

"We collaborated closely with our customers to identify purity requirements to meet their need to remove new contaminants and increased sensitivity to known contaminants," says Jordan Ruple, director of Gas Purification Product Management. "As a result, we are proud to be the first to offer this level of purity – in a variety of gases and flow rates – for systems of this size," he adds.

Tags: Entegris

Visit: www.entegris.com

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