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29 August 2018

HLJ orders Aixtron AIX 2800G4-TM MOCVD systems to expand VCSEL production capacity and epiwafer size

© Semiconductor Today Magazine / Juno PublishiPicture: Disco’s DAL7440 KABRA laser saw.

Deposition equipment maker Aixtron SE of Herzogenrath, Germany says that new customer HLJ Technology Co Ltd of Hsinchu Industrial Park, Taiwan - which was founded in 2001 and manufactures vertical-cavity surface-emitting laser (VCSEL) epitaxial wafers and chips - has ordered multiple AIX 2800G4-TM metal-organic chemical vapor deposition (MOCVD) systems to increase the capacity as well as epiwafer size (from 4-inch to 6-inch) of its production line. Aixtron’s fully automated Planetary Reactor systems will be supplied in 8x6-inch configuration in fourth-quarter 2018 and beyond.

“To meet fast-growing market demand for VCSEL both at epiwafer and chip levels, we decided to expand to 6-inch epi wafer manufacturing,” says HLJ’s general manager Dr Larry Lai. “Starting from Q4/2018, two sets of newly ordered Aixtron MOCVD systems are scheduled to arrive at HLJ. In Q2/2019, the first complete high-volume VCSEL production line will be ready,” he adds.

“Looking forward to our cooperation with HLJ, we will support the company in the alignment of their production processes to our equipment technology,” comments Aixtron’s president Dr Bernd Schulte.

Tags: Aixtron MOCVD VCSELs

Visit: www.hlj.com.tw

Visit: www.aixtron.com

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