27 March 2018

Veeco installs 100th automated MBE system

© Semiconductor Today Magazine / Juno PublishiPicture: Disco’s DAL7440 KABRA laser saw.

Epitaxial deposition and process equipment maker Veeco Instruments Inc of Plainview, NY, USA has completed installation of its 100th automated molecular beam epitaxy (MBE) system – specifically a GEN10 MBE installed at Silanna Semiconductor Pty Ltd in Brisbane, Australia. Founded in 2006, Silanna already operates a Veeco Dual GEN200 MBE system for the production of nitride-based devices including ultraviolet light-emitting diodes (UV-LEDs).

“Veeco has earned a reputation for consistently developing innovative and reliable MBE technology from research scale to production,” comments Silanna’s chief scientist Petar Atanackovic Ph.D. “The flexibility and deposition capability of the GEN10 system will enable us to develop new materials at the atomic level, allowing us to exploit new quantum properties,” he adds. “Veeco’s technology portfolio and leadership in MBE systems provides us with a clear path to easily scale to volume production in the future.”

Silanna is using the GEN10 system for advanced oxide R&D for optoelectronic devices. Veeco says that the GEN10 is built upon almost 20 years of cumulative automation knowledge and derived from the company’s proven production MBE systems. Adopted by many corporations, institutions and universities for all major MBE applications, Veeco says that the GEN10 is often used because of its flexibility, which allows configuration of the system for a particular application. This is said to give optimal performance with any material set, including those related to III-V group elements, oxides and nitrides.

“Silanna has achieved remarkable results on its previous MBE systems,” comments Gerry Blumenstock, VP & general manager, Veeco MBE Products. “As our customers explore novel materials and new applications, they can rely on Veeco to deliver innovative MBE systems, sources and components for use in complex R&D, as well as high-volume production environments.”

Tags: Veeco MBE

Visit: www.silanna.com

Visit: www.veeco.com/technologies-and-products/mbe-systems