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21 December 2006


Tegal receives etch system order from Skyworks

Plasma etch and deposition system maker Tegal Corp of San Jose, CA, USA has received an order for a 6500 Advanced Etch cluster tool from GaAs IC maker Skyworks Solutions Inc of Woburn, MA, USA for shipment to its 4” fab in Newbury Park, CA. The high-vacuum system will be used to etch SiN and other critical thin films for devices to be incorporated in wireless handset, automotive, broadband, cellular infrastructure, industrial and medical applications.

“The 6500 Advanced Etch system was selected on the basis of the unique capabilities of our innovative HRe- (High-density Reflected electron) source,” says Thomas Mika, Tegal’s president and CEO. “A key focus area for our company is the compound semiconductor space, which is seeing renewed growth due to the ubiquitous usage of wireless electronics.”

“The HRe- chamber enables us to etch films on GaAs substrates at a low temperature with suitable etch rate, etch profile and selectivity to mask and under-layer,” says Dr Nercy Ebrahimi, Skyworks’ director of Process Technology. “These etch characteristics are important for us to manufacture our advanced wireless devices [AlGaAs and InGaP HBTs, and GaAs BiFETs],” he adds.

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