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Semiconductor Today Magazine


27 June 2006


UCSD opts for another Thomas Swan MOCVD CCS reactor

Aixtron AG has received a repeat order for a Thomas Swan MOCVD Close Coupled Showerhead (CCS) reactor from the University of California, San Diego (UCSD), in La Jolla, California, USA.

The system, configured for 3x2-inch wafers, will be used to research new materials and micro- to nano-scale structures for telecommunications, computing and energy research applications. It will also provide materials for several U.S. Department of Defense funded research programs, into such areas as optoelectronic integrated circuits and nano-electronics, including materials for devices such as quantum wells, quantum dots and quantum wires.

Bernd Schulte, executive VP and COO of AIXTRON, said: "Notably, UCSD has chosen the brand new 3x2-inch Fliptop Platform. This small footprint system offers class-leading performance for small reactors. With an all-new control system providing digital control of mass flow controllers and pressure controllers, it also has a new state-of-the-art safety system.

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