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Semiconductor Today Magazine


28 June 2006


Tokyo Electron America orders BedeMetrix-L for SiC and SiGe 

Bede X-ray Metrology has received an order for its BedeMetrix-L metrology system from Tokyo Electron America Inc, Austin, USA.  The process control system will be used to investigate leading-edge front end materials, such as SiC and SiGe.

Anthony Dip, process manager, Tokyo Electron America Inc, said: “X-ray metrology is more important than ever in helping semiconductor manufacturers to fully understand their materials and processes.  For Tokyo Electron as a thin film equipment provider, the BedeMetrix-L system is the best solution to enable us to analyse important advanced
materials, using parameters that are essential for device functionality at our customers’ new technology nodes.”

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