Mark Telford (Email)
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Semiconductor Today Magazine


7 June 2006


New customers for Veeco’s automated AFMs

Veeco Instruments Inc has received two new orders for its Dimension family of automated atomic force microscopes (AFMs).

After evaluation by an undisclosed U.S. semiconductor manufacturer, the Dimension X AFM was selected for metrology applications. In addition, the customer recently selected the Dimension X3D as a reference metrology tool for optical proximity correction (OPC) applications for three-dimensional metrology.

A second customer, the name of which was also undisclosed, is a foundry in Taiwan. It selected the Dimension X3D as a reference metrology tool for key process levels.

Jeannine Sargent, executive VP of Veeco Metrology and Instrumentation, said: "Our breadth of line in AFM enables us to tailor solutions for specific production and R&D challenges which are currently being faced by our customers at 90nm and below."

Paul Clayton, VP and business unit manager of Veeco's Auto AFM Business, added: “Our Dimension X provides fast, highly repeatable characterization and control of advanced etch processes and proven correlation to SEM techniques. The NIST-traceable X3D offers fabs an exceptional alternative to other tools available for process development, integration and monitoring."

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