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30 July 2007


PANalytical introduces analytical software for epi-layers

Analytical instrumentation and software supplier PANalytical of Almelo, the Netherlands has introduced X’Pert Epitaxy and Smoothfit software version 4.2 for the analysis of epitaxial layers using its X’Pert PRO MRD and earlier high-resolution X-ray diffractometers. The new software uses XRDML formatting.

According to the company, X’Pert Epitaxy and Smoothfit automatically fits simulated rocking curves to measurement data. Furthermore, it offers five different algorithms and can be tailored for unique fitting requirements. The algorithms are:

  • Smoothfit - for control of adjustment parameters and obtaining a measurement of precision.
  • Levenberg-Marquardt - for automatic adjustment calculation.
  • Principal Axis - for a true statistical sweep of parameter space.
  • Genetic Algorithm - a global optimization technique for starting parameter values of low confidence levels.
  • Simulated Annealing - which avoids local minima problems.

A fitting tab shows the live status of all parameters being fitted, and on completion any parameter approaching upper or lower limits is highlighted.