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26 October 2006


CNU adds second Thomas Swan MOCVD system

Chonbuk National University (CNU) of South Korea ordered a Thomas Swan Close Coupled Showerhead (CCS) MOCVD system in Q2/2006 from Aixtron AG of Aachen, Germany. In 3x2-inch wafer configuration, the system will be installed at CNU’s cleanrooms in Dukjin-Ku, Chonju, and used to manufacture high-brightness gallium nitride based LEDs. This order marks the second by CNU for a Thomas Swan MOCVD system.

"We have been one of the first users of Thomas Swan CCS reactors and have built up a strong relationship with Aixtron and its local support and service team. We find the Thomas Swan Close Coupled Showerhead system to be well-matched to our requirements for very good process flexibility, uniformity in thickness, doping, and composition," said Professor Chang-Hee Hong, of CNU’s SPRC (Semiconductor Physics Research Center). He continued: "Together with our existing system we will have an excellent platform on which to base our research into high-brightness gallium nitride based LED structures".