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10 July 2008


Rohm and Haas launches enhanced version of MO precursor central delivery system

Rohm and Haas Electronic Materials of North Andover, MA, USA has made available a second-generation VaporStation central delivery system that provides several enhancements to the original version. The new systems use the latest version of Matheson Tri-Gas Inc’s IvMB inverted mini bubbler, plus optimized control software and an improved panel layout.

Picture: The VaporStation central delivery system (with a cylinder installed and ready for deposition).

Metalorganic (MO) precursor supplier Rohm and Haas designed the VaporStation central delivery system in cooperation with Matheson Tri-Gas Inc, which has supplied molecule delivery systems for more than 15 years. The system is designed to deliver a precisely metered vapor of trimethylgallium (TMGa) and other MO precursors to multiple MO chemical vapor deposition (MOCVD) reactors from a central supply source cabinet holding a 20kg TMGa supply cylinder. Using the VaporStation central delivery system, the traditional onboard TMGa cylinders can be eliminated and the TMGa line inside the MOCVD reactor can be simplified to comprise just one MFC to control the flow of the TMGa/carrier gas mixture into the reaction chamber.

Rohm and Haas Electronic Materials says that it engineered the upgraded system to provide a near-constant fill level in the IvMB evaporator, optimized metalorganic-carrier gas intermixing, and improved efficiency and ergonomics. “First-generation systems have been installed at industry-leading manufacturers since 2004 with an excellent record for reliability and performance,” says Joe Reiser, general manager for Rohm and Haas Electronic Materials’ Metalorganics business. “Everything we learned from the use of these systems and the customer feedback we received was incorporated into the design of the second generation,” he adds.

The VaporStation can deliver a stable MO precursor concentration at a precisely controlled flow rate to up to 10 MOCVD reactors from a single 20kg supply cylinder. Rohm and Haas claims that VaporStation has shown excellent performance and superior economy over the traditional on-board MO source approach, in which each MOCVD reactor requires its own cylinder.

Rohm and Haas expects the VaporStation installed base to continue to rise quickly. It has recently installed several second-generation systems at leading LED makers, and more installations are scheduled this year. As high-brightness LED makers continue to add capacity, the industry is turning towards innovative technology to reduce their production costs and drive efficiency, the firm claims.

Rohm and Haas says that it is also closely monitoring demand and maintaining its quality assurance efforts, targeting zero-error delivery of precursors during the deposition process. “With a central delivery system supplying a significant portion of an LED fab, there is no tolerance for any error,” says Reiser. “Rohm and Haas has more than 30 years of experience providing high-purity metalorganic precursors,” he adds. “Our close collaboration with our customers and MOCVD equipment manufacturers has shown us that there is a need for the VaporStation delivery system. We believe we are best positioned to supply both the precursors and a reliable delivery system,” he concludes.

See related item:

Rohm and Haas divests stake in precursor manufacturer UP Chemical

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