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14 October 2008


EVG ships 100th nanoimprint lithography system

EV Group (EVG) of St Florian, Austria, which supplies wafer bonding and lithography equipment for micro-electro-mechanical system (MEMS), nanotechnology and semiconductor markets, has shipped its 100th nanoimprint lithography (NIL) system. EVG says that the shipment is significant not only for the firm (which has a market share of about 30%, with the most NIL systems in the field) but also for the industry overall, as it highlights the significant growth of the global NIL installed base, which has more than doubled over the past four years.

“Nanoimprint lithography is an enabling technology for optical and microfluidic applications,” says executive technology director Paul Lindner. “With EVG’s firm commitment to NIL development and commercialization, together with our industry-leading NIL products, including our EVG770 fully automated NIL Stepper and EVG750 fully automated Hot Embossing systems, we remain well positioned to benefit as these and other markets such as chemical and biosensor move into high-volume production,” he adds.

EVG says that its 100th NIL system shipment underscores the ongoing drive to broaden the adoption of NIL processes. In 2004, EVG founded the NILCOM Consortium, whose dozen members span equipment, materials, processes and research. Its aim is to establish a high-volume NIL manufacturing platform that can be commercially deployed in a wide range of technology arenas, including nanoelectronics, optoelectronics, data storage and life sciences.

Recent successes have included NIL processes being used commercially in the optics market for CMOS image sensors, optical gratings and LEDs, as well as a commitment from the hard disk drive (HDD) market to employ NIL for their roadmaps in discrete track recording (DTR) and bit pattern media (BPM).

*EVG will present its new working stamp technology for UV-based imprint lithography applications at the 7th annual International Conference on Nanoimprint and Nanoprint Technology (NNT) at the Kyoto International Conference Center, Japan (13-15 October).

See related item:

EVG opening Korean subsidiary to strengthen sales, service and support

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