FREE subscription
Subscribe for free to receive each issue of Semiconductor Today magazine and weekly news brief.



26 March 2009


MiPlaza adds STS CPX cluster tool to range of technologies

Surface Technology Systems plc (STS) of Newport, Wales, UK has installed a CPX cluster tool at MiPlaza (Microsystems Plaza). The tool has multiple process chambers capable of etching a wide range of materials. Furthermore, STS and MiPlaza are to cooperate on process development using the installed equipment.

MiPlaza is part of Philips Research and offers expertise, service and infrastructure to external companies and research institutes. Its facilities are located at the High Tech Campus Eindhoven, the Netherlands, where it offers a wide range of technologies, such as MOVPE (for III-V compound semiconductors), CVD, PVD, ion implantation, lithography, inspection, and etch.

“Because MiPlaza is a shared facility, our processing equipment has to be versatile enough to support a wide range of applications,” said Frank Dirne, head of MiPlaza’s Thin Film facilities. “At the same time, it has to satisfy highly demanding specifications. We need flexibility in the field of standard etching of oxides and nitrides, deep Si etching and etching of a whole variety of metals, all with feature dimensions of excellent quality. We believe that our new STS CPX system can fulfil these roles, as well as provide the predictive capabilities needed to accelerate technology innovation”.

Eizo Yasui, CEO of STS, said: “Winning this order at a leading European facility, with exposure to a large number of users, was important for us. We are confident our CPX provides the ideal combination of flexibility and market-leading process capabilities on a production-proven system, to enable MiPlaza and their clients to transfer their own innovations into new business successes.”

See related item:

Altatech, Evatec and DuPont launch deposition products at SEMICON Europa

Search: Surface Technology Systems Etch