12 August 2010


Oxford Instruments’ wins multi-system order from Taiwanese HB-LED chip maker

UK-based equipment maker Oxford Instruments Plasma Technology (OIPT) has received a multiple system order from a major Taiwan-based LED epiwafer and chip maker, for use in the production of high-brightness LEDs (HB-LEDs).

The order brings the total number of tools ordered by the customer to 25, comprising a mixture of Oxford Instruments’ family of batch production solutions including the compact 800Plus PECVD system for high-quality dielectric films; the System133 PECVD batch deposition tool for thick-film deposition; and the System133 ICP tool for high-quality etching of sapphire and gallium nitride (GaN). Oxford Instruments says that their systems were chosen as they offer very high throughput and uniformity (crucial in the production of HB-LEDs).

“We are extremely pleased to supply such a major player in this area with so many of our high-quality tools, across the range, to satisfy their production requirements,” says OIPT’s sales director Mark Vosloo. “Oxford Instruments has been a leading supplier of equipment to HBLED manufacturers for over 10 years, and this order is testament to the continuous product and process development at the company.”

See related items:

Oxford Instruments' HB-LED tool sales boosted by LCD TV backlighting demand

See: Oxford Instruments Company Profile

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