15 July 2010


Plasma-Therm sells VERSALINE PECVD system to wireless component maker

Plasma process equipment maker Plasma-Therm LLC of St Petersburg, FL, USA says that a leading US-based global wireless components manufacturer has chosen to add a VERSALINE PECVD/HDPCVD system to its manufacturing assembly as it enhances its fab facility in preparation for the projected ramp up in the wireless industry.

This VERSALINE system is a multi-chamber configuration with a high-density plasma deposition source module and a standard PECVD module. The versatile system is built to handle two independent cassette chambers and up to four process modules. VERSALINE’s platform has a foundation that is built to easily manage composition and stress control and monitor film thickness as well as other characteristics of quality, accurately with repeatable results.

“The flexible configuration options of VERSALINE’s platform allow equipment users to find the custom results they demand at a low cost of ownership,” says Ed Ostan, executive VP of sales & marketing. “From research laboratories to high-volume production environments, Plasma-Therm stands by our tools and our ability to provide custom solutions to specialty market challenges.”

See related item:

Plasma-Therm sells PECVD systems to South Korean LED maker

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