20 April 2010


Plasma-Therm sells PECVD systems to South Korean LED maker

Plasma process equipment maker Plasma-Therm LLC of St Petersburg, FL, USA says that it has sold three VERSALINE PECVD systems to a leading South Korean LED maker.

As additional orders that complement other Plasma-Therm systems currently installed at the LED maker’s fabrication plant, the tools were purchased to meet capacity expansion needs for high-quality dielectric film deposition.

The systems use Plasma-Therm’s fully integrated EndpointWorks, which facilitates accurate and repeatable real-time endpoint process control. “The innovative drive within the LED industry has been consistently pushing to perfect cost-efficient and energy-efficient lighting solutions,” says executive VP of sales & marketing Ed Ostan.

See related item:

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Plasma-Therm celebrates first year of independence and reports positive financial results for FY/2009

Plasma-Therm sells multi-module ICP etch system to III-V foundry

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