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20 April 2010
Plasma-Therm sells PECVD systems to South Korean LED maker
Plasma process equipment maker Plasma-Therm LLC of St Petersburg, FL, USA says that it has sold three VERSALINE PECVD systems to a leading South Korean LED maker.
As additional orders that complement other Plasma-Therm systems currently installed at the LED maker’s fabrication plant, the tools were purchased to meet capacity expansion needs for high-quality dielectric film deposition.
The systems use Plasma-Therm’s fully integrated EndpointWorks, which facilitates accurate and repeatable real-time endpoint process control. “The innovative drive within the LED industry has been consistently pushing to perfect cost-efficient and energy-efficient lighting solutions,” says executive VP of sales & marketing Ed Ostan.
See related item:
Plasma-Therm joins Fab Owners Association to share dry etch and PECVD insights
Plasma-Therm sells multi-module ICP etch system to III-V foundry
Search: Plasma-Therm PECVD
Visit: www.plasmatherm.com
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