19 July 2010


Arima chooses Veeco MOCVD systems for production ramp

Epitaxial deposition, process, and metrology equipment maker Veeco Instruments Inc of Plainview, NY, USA says that in second-quarter 2010 Taiwan-based LED epiwafer and chips maker Arima Optoelectronics Corp (AOC) has bought multiple TurboDisc K465i gallium nitride (GaN) and E475 arsenic phosphide (As/P) metal-organic chemical vapor deposition (MOCVD) systems.

“We have selected Veeco’s MOCVD systems because of our experience with their production-proven reliability and high productivity, which results in higher capital efficiency,” says Arima Optoelectronics’ president Marco Kuo. “Most of the systems will be installed in Shanxi Province, northern China, where we have entered into an agreement with the local government to form a new joint venture company to manufacture LEDs for backlight applications,” he adds.

According to a report in Digitimes last December, AOC is investing US$17.6m for a 40% stake in the joint venture plant but will receive US$39.6m for providing technical know-how and services in the establishment of production lines and subsequent production.

“We are pleased to expand our long-standing relationship with Arima, and to be chosen to support their production ramp,” comments Bill Miller Ph.D., senior VP, general manager of Veeco’s MOCVD operations.

With what is reckoned to be superior wavelength uniformity and run-to-run repeatability, Veeco says that the production-proven K465i extends its capital efficiency (the number of good wafers per day for each capital dollar) for high-volume LED makers, and provides ease-of-tuning for fast process optimization on wafer sizes up to 8 inches and fast tool recovery time after maintenance. The E475 is engineered for high-volume production of red, orange and yellow HB-LEDs, the firm adds. 

See related items:

Taiwanese LED makers set up plants in China

Veeco launches TurboDisc K465i GaN MOCVD system

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