23 September 2010


KAUST places order for multiple EVG systems

Wafer bonding and lithography equipment maker EV Group (EVG) of St. Florian, Austria has shipped an EVG520IS semi-automated wafer bonding system and two EVG6200 automated alignment systems to King Abdullah University of Science and Technology (KAUST) in Saudi Arabia.

Graduate-level students will use the equipment for advanced technology R&D, including projects outsourced to KAUST from technology firms in the region. One EVG6200 will be utilised for bond alignment and nanoimprint lithography (NIL), while the other will be for lithography mask alignment.

"We were impressed with the EVG systems' performance and ability to multitask, which will be of great value in working on the variety of research projects that the university is undertaking. Moreover, EV Group has proven its ability to provide us with excellent onsite process and application support so that our local needs can be met quickly and efficiently," said Dr Xixiang Zhang, manager of the Nanofabrication, Imaging & Characterization Core Lab of KAUST.

KAUST, which opened in September 2009, represents EVG's first customer headquartered in the Middle East.

EVG’s executive technology director, Paul Lindner, said: "Working with KAUST is an important milestone for EVG, as technology activity in this region of the world continues to expand. Moreover, working with this prestigious institution marks a further step in our partnering with leading universities and research firms around the world in their efforts to develop solutions to today's challenges as well as explore advancements that will address future needs."

In the past year, EVG has received orders to support a wide range of R&D and university-related projects from the University of Texas at Arlington, the University of Michigan's Lurie Nanofabrication Facility, the Institute of Microelectronics in Singapore, Europe's Imec, and the RFID/USN Center in Korea.

See: EV Group Company Profile

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