6 June 2012

Veeco launches suite of GaN MOCVD systems for LED manufacturing

Epitaxial deposition and process equipment maker Veeco Instruments Inc of Plainview, NY, USA has introduced three new models of its TurboDisc metal-organic chemical vapor deposition (MOCVD) systems for the production of high-brightness light-emitting diodes (LEDs): TurboDisc MaxBright M, TurboDisc MaxBright MHP and TurboDisc K465i HP.

Picture: The MaxBright MHP provides as much as 20% within-wafer wavelength uniformity improvement over MaxBright.

MaxBright M is a modular and more compact version of Veeco’s MaxBright multi-reactor system, providing easier serviceability and up to 15% improved footprint efficiency. It also features improved layout configuration flexibility to accommodate various fab spacing requirements.

MaxBright MHP is a high-performance version of the new modular ‘M’, providing as much as 20% within-wafer wavelength uniformity improvement over MaxBright. Higher yields are achieved from technology advancements that result in improved thermal and flow capability. The MHP also provides lower cost of ownership compared with MaxBright.

K465i HP is a high-performance option for Veeco’s existing K465i single-reactor MOCVD system, delivering up to 20% within-wafer wavelength uniformity improvement as well as lower cost of ownership.

The new systems are available in 2”, 4”, 6” and 8”-wafer configurations. Existing MaxBright and K465i systems are easily field-upgradeable to the high-performance HP option. Veeco says that all of its MOCVD systems feature its low-maintenance TurboDisc technology, which enables what is reckoned to be the highest system availability and throughput.

According to analyst firm IMS Research, the existing K465i (introduced in 2010) was the top selling MOCVD tool that year, and the MaxBright (launched in 2011) was the top seller last year.

“This new suite of products provides our customers with tremendous flexibility to make the most of their capital investments and choose the system that works best in their unique production environment,” says William J. Miller Ph.D., executive VP, Veeco Process Equipment. “The innovation in the MaxBright M, MaxBright MHP and K465i HP was accomplished by listening to our customers and focusing on system improvements that could drive their productivity and yield,” he adds.

“This new product line-up, all based on our industry-leading technology and automation expertise, can help to accelerate worldwide adoption of LED lighting by reducing manufacturing costs,” believes chairman & CEO John R. Peeler. “Veeco remains committed to providing the industry's highest-capacity, highest-throughput and lowest-cost-of-ownership MOCVD systems available.”

See related items:

Veeco launches MOCVD multi-reactor system for HB-LEDs

See: Veeco Company Profile

Tags: Veeco MOCVD GaN LEDs

Visit: www.veeco.com/maxbrightmhp

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