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23 May 2018

VPEC chooses LayTec for VCSEL manufacturing

© Semiconductor Today Magazine / Juno PublishiPicture: Disco’s DAL7440 KABRA laser saw.

LayTec AG of Berlin, Germany says that its in-situ metrology products have been chosen by pure-play foundry Visual Photonics Epitaxy Co Ltd (VPEC) of Ping-Jen City, Taiwan for its vertical-cavity edge-emitting laser (VCSEL) production.

Supporting worldwide VCSEL chip demand for 3D sensing and other rapidly growing applications, LayTec’s dedicated VCSEL Add-On to its EpiTT and EpiCurve TT systems provides additional in-situ spectral reflectance sensing and can be customized in wavelength ranges for gallium arsenide (GaAs)-based and indium phosphide (InP)-based near-infrared/infrared (NIR/IR) VCSEL processes, enabling high-yield manufacturing of these very complex multi-layer device structures.

The VCSEL Add-On is also available as an upgrade to existing EpiTT or EpiCurve TT systems. Equipped with advanced real-time analysis algorithms, it monitors distributed Bragg reflector (DBR) stop-bands and cavity dip position during VCSEL epitaxy in addition to the EpiTT’s wafer temperature and growth rate, as well as the EpiCurve TT’s wafer bow measurements.

“VPEC has choosen LayTec’s market-leading in-situ process technology for VCSEL wafer manufacturing as an essential part for accomplishing our high standards in quality and yield,” comments VPEC senior VP Neil Chen. “Combining existing control of wafer temperature, wafer bow and growth rates with the new spectral monitoring capabilities is a key for VCSEL foundries in terms of process transfer, rapid recipe changes and scaling up,” he adds.

See related items:

LayTec ships further EpiTT VCSEL systems to leading VCSEL maker in USA

LayTec receives first order for EpiTT/VCSEL

Tags: LayTec Metrology MOCVD VPEC

Visit: www.laytec.de/VCSEL

Visit: www.vpec.com.tw

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