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8 November 2007


Skyworks orders second Tegal 6500 system for etching SiN and other thin films on GaAs substrates

RFIC maker Skyworks Solutions Inc of Woburn, MA, USA has ordered a second 6500 Advanced Etch cluster tool from plasma etch and deposition systems maker Tegal Corporation of Petaluma, CA, USA. The system will be installed in Skyworks’ fab in Southern California, joining the company’s existing Tegal 6500 (ordered in December 2006) already in use for etching SiN and other thin films on GaAs substrates.

“Skyworks’ selection of the Tegal 6500 system for this repeat etch tool order is evidence of the high degree of confidence Skyworks has in Tegal’s technical capabilities and plasma etch process results,” said Scott Brown, VP, North American Sales, Tegal Corporation. “It also demonstrates Tegal’s strong ongoing commitment to the compound semiconductor fabrication market for both plasma etch and for PVD applications, and Tegal’s strong commitment to our innovative customers, like Skyworks Solutions, in the compound semiconductor space.”

The 6500 etch system is a high-vacuum cluster tool used in production fabs to etch a variety of thin films, and according to Tegal it has an easy-to-use GUI, SECS/GEM communication, and flexible wafer shape and size handling capabilities. Optional integrated plasma strip and rinse chambers, electro-static chucks with a wide temperature range, plasma emission diode array end-point detection, and active wafer temperature monitoring and control are also available.

*Tegal hails first quarterly profit since December 2000

For its second quarter of fiscal 2008 (ended September 30, 2007), Tegal recorded revenues of $10.8m, up 111% from the $5.1m in the same period last year. Net income for the quarter was $0.7m, compared with a net loss of ($3.3m) in the same period last year, and a net loss of ($0.6m) in the prior quarter.

“We are pleased to report our first quarterly profit since December 2000, a very significant milestone,” said Thomas Mika, President and CEO of Tegal Corporation. “We have made substantial progress in the strategic re-engineering of our business, improving our overall cost structure and delivering sales growth, while continuing to work towards driving new product introductions. This quarter we remained focused on manufacturing and also field support for the many advanced systems that we have recently delivered.”

See related items:

Skyworks double earnings, driven by multi-mode FEMs and linear products

Skyworks converting GaAs HBT fab to 6-inches and partnering with Taiwanese foundries

RFMD, Skyworks and Triquint grew GaAs device market share to 55% in 2006

Tegal’s sales dip further; signs up Korean distributor

Tegal receives etch system order from Skyworks

Search: Plasma etch GaAs substrates