22 March 2010


Jordan Valley Semiconductors acquires assets of VUV metrology firm Metrosol

X-ray metrology tool maker Jordan Valley Semiconductors Ltd (JVS) of Migdal Haemek, Israel has acquired the assets of Metrosol of Austin, TX, USA, an advanced Vacuum Ultra Violet (VUV) metrology tool firm, effective 19 March 2010.

"The acquired VUV technology will strengthen Jordan Valley's position as a key metrology solutions provider for the sub 45nm semiconductors processes while expanding its capabilities to new markets such as the emerging patterned HDD market," said Isaac Mazor, JVS’ CEO.

Founded in 2002, Metrosol manufactures advanced thin-film measurement systems that solve the needs of next-generation semiconductor manufacturing, such as process monitoring and excursion suppression for high-k gate structures and multilayer dielectric stacks. The firm’s SHORTY ES (Enhanced Spectrum) Series short wavelength optical metrology tools are the only commercially available systems able to collect optical reflectance data down to 120 nanometers, it is claimed. These shorter wavelengths enable greater sensitivity on thickness, composition, and optical property measurements on the complex films and stacks necessary to achieve desired device performance.

VUV technology is the most sensitive non-destructive optical metrology available for ultra thin FEOL layers, such as Hi-K dielectric and Metal gates, and therefore complements JVS’ X-ray-based semiconductor metrology solutions.

JVS says it offers the semiconductor industry the most comprehensive array of tools, based on advanced XRR, XRF, HRXRD, WAXRD and SAXS technologies, ideal for both product or blanket wafers. For the compound semiconductor industry, JVS offers HRXRD tools for HB-LED manufacturing.

See related item:

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